Plasma electronics. ed.2 :applications in microelectronic device fabrication

Bibliographic Details
Main Author: Makabe, T.
Other Authors: Petrović, Z.
Format: Printed Book
Language:English
Published: London CRC 2015
Edition:Second edition.
Subjects:
Plasma engineering

PHY

Holdings details from PHY
Call Number: 621.044 MAK
Copy Live Status Unavailable

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