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140804t20142014flu b 001 0 eng c |
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|a 621.044
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| 100 |
1 |
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|a Makabe, T.
|9 9408
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| 245 |
1 |
0 |
|a Plasma electronics. ed.2
|b :applications in microelectronic device fabrication
|c Toshiaki Makabe, Zoran Lj. Petrovic.
|
| 250 |
|
|
|a Second edition.
|
| 300 |
|
|
|a 376p.
|
| 653 |
|
|
|a Plasma engineering
|
| 700 |
1 |
|
|a Petrović, Z.
|9 9407
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
|
|a London
|b CRC
|c 2015
|
| 020 |
|
|
|a 9781482222050
|
| 999 |
|
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|c 215601
|d 215601
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| 952 |
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|9 279513
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|d 2015-04-09
|o 621.044 MAK
|p PHY014417
|r 2018-05-17
|w 2018-05-17
|y BK
|