Makabe, T., & Petrović, Z. (2015). Plasma electronics. ed.2: :applications in microelectronic device fabrication (Second edition.). CRC.
Dyfyniad Arddull ChicagoMakabe, T., and Z. Petrović. Plasma Electronics. Ed.2: :applications in Microelectronic Device Fabrication. Second edition. London: CRC, 2015.
Dyfyniad MLAMakabe, T., and Z. Petrović. Plasma Electronics. Ed.2: :applications in Microelectronic Device Fabrication. Second edition. CRC, 2015.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.