Makabe, T., & Petrović, Z. (2015). Plasma electronics. ed.2: :applications in microelectronic device fabrication (Second edition.). CRC.
Chicago Edition CitationMakabe, T., and Z. Petrović. Plasma Electronics. Ed.2: :applications in Microelectronic Device Fabrication. Second edition. London: CRC, 2015.
MLA Edition CitationMakabe, T., and Z. Petrović. Plasma Electronics. Ed.2: :applications in Microelectronic Device Fabrication. Second edition. CRC, 2015.
Warning: These citations may not always be 100% accurate.