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VLSI micro- and nanophotonics : science, technology, and applications /

Bibliografski detalji
Daljnji autori:	Lee, El-Hang., ed
Format:	Printed Book
Jezik:	English
Izdano:	Boca Raton, FL : CRC Press, 2010.
Teme:	Microelectromechanical systems--Technological innovations. > Nanophotonics--Technological innovations. > Integrated circuits--Very large scale integration

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