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100614s2010 flua b 001 0 eng |
| 082 |
0 |
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|a 621.39/5
|b VLS
|
| 245 |
0 |
0 |
|a VLSI micro- and nanophotonics : science, technology, and applications /
|c editors, El-Hang Lee ... [et al.].
|
| 300 |
|
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|a 1 v. :
|b ill. ;
|c 26 cm.
|
| 653 |
|
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|a Microelectromechanical systems--Technological innovations.
|a Nanophotonics--Technological innovations.
|a Integrated circuits--Very large scale integration
|
| 700 |
1 |
|
|a Lee, El-Hang., ed.
|9 9169
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
|
|a Boca Raton, FL :
|b CRC Press,
|c 2010.
|
| 020 |
|
|
|a 9781574447293
|
| 999 |
|
|
|c 215425
|d 215425
|
| 952 |
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|9 279289
|a PHY
|b PHY
|d 2012-06-20
|o 621.39/5 VLS
|p PHY013814
|r 2018-05-17
|w 2018-05-17
|y BK
|