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Silicon devices and process integration : deep submicron and nano-scale technologies /
| Main Author: | |
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| Format: | Printed Book |
| Language: | English |
| Published: |
New York :
Springer,
2009.
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| Subjects: |
PHY
| Call Number: |
621.381/7 ELK |
|---|---|
| Copy | Live Status Unavailable |