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Silicon devices and process integration : deep submicron and nano-scale technologies /
| Egile nagusia: | |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
New York :
Springer,
2009.
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| Gaiak: |
| Deskribapen fisikoa: | p. cm. |
|---|---|
| ISBN: | 9780387367989 |