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Silicon devices and process integration : deep submicron and nano-scale technologies /
| Autor principal: | |
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| Formato: | Printed Book |
| Lenguaje: | English |
| Publicado: |
New York :
Springer,
2009.
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| Materias: |
| Descripción Física: | p. cm. |
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| ISBN: | 9780387367989 |