El-Kareh, B. (2009). Silicon devices and process integration: Deep submicron and nano-scale technologies. Springer.
Chicago Stili AlıntıEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. New York: Springer, 2009.
MLA AlıntıEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. Springer, 2009.
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