El-Kareh, B. (2009). Silicon devices and process integration: Deep submicron and nano-scale technologies. Springer.
Chicago-стиль цитированияEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. New York: Springer, 2009.
MLA-цитированиеEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. Springer, 2009.
Предупреждение: эти цитированмия не могут быть всегда правильны на 100%.