El-Kareh, B. (2009). Silicon devices and process integration: Deep submicron and nano-scale technologies. Springer.
Chicago ZitierstilEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. New York: Springer, 2009.
MLA ZitierstilEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. Springer, 2009.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.