El-Kareh, B. (2009). Silicon devices and process integration: Deep submicron and nano-scale technologies. Springer.
Chicago Edition CitationEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. New York: Springer, 2009.
MLA Edition CitationEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-scale Technologies. Springer, 2009.
Warning: These citations may not always be 100% accurate.