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Non-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy

書目詳細資料
主要作者:	Paulraj, M.
其他作者:	Vijayakumar, K. P (Guide)
格式:	Printed Book
語言:	English
出版:	Cochin: Cochin University of Science and Techonology, 2004.
主題:	Thin film

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