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Non-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy

Bibliografiska uppgifter
Huvudupphovsman:	Paulraj, M.
Övriga upphovsmän:	Vijayakumar, K. P (Guide)
Materialtyp:	Printed Book
Språk:	English
Publicerad:	Cochin: Cochin University of Science and Techonology, 2004.
Ämnen:	Thin film

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