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Non-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy

Xehetasun bibliografikoak
Egile nagusia:	Paulraj, M.
Beste egile batzuk:	Vijayakumar, K. P (Guide)
Formatua:	Printed Book
Hizkuntza:	English
Argitaratua:	Cochin: Cochin University of Science and Techonology, 2004.
Gaiak:	Thin film

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