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Non-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy

Bibliographic Details
Main Author: Paulraj, M.
Other Authors: Vijayakumar, K. P (Guide)
Format: Printed Book
Language:English
Published: Cochin: Cochin University of Science and Techonology, 2004.
Subjects:
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100 |a Paulraj, M.  |9 9035 
245 |a Non-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy 
300 |a Ph. D 
653 |a Thin film 
700 |a Vijayakumar, K. P (Guide)  |9 8969 
942 |c REF  |6 _ 
260 |a Cochin:  |b Cochin University of Science and Techonology,  |c 2004. 
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