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Non-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy
| Egile nagusia: | |
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| Beste egile batzuk: | |
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
Cochin:
Cochin University of Science and Techonology,
2004.
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| Gaiak: |
| Deskribapen fisikoa: | Ph. D |
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