Smith, D. L. (1995). Thin-film deposition: Principles and practice. McGraw-Hill.
Chicago Edition CitationSmith, Donald L. Thin-film Deposition: Principles and Practice. New York: McGraw-Hill, 1995.
MLA Edition CitationSmith, Donald L. Thin-film Deposition: Principles and Practice. McGraw-Hill, 1995.
Warning: These citations may not always be 100% accurate.