Hydrogenated amorphous silicon alloy deposition processes /

Sonraí Bibleagrafaíochta
Príomhúdar: Luft, Werner
Údair Eile: Tsuo, Y. Simon
Formáid: Printed Book
Teanga:English
Foilsithe: New York : M. Dekker, c1993.
Sraith:Applied physics series (Marcel Dekker, Inc.) ; 1.
Ábhair:
Thin film devices--Design and construction > Silicon alloys > Plasma-enhanced chemical vapor deposition > Thin films--Optical properties > Thin films--Electric properties.

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