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Handbook of thin film materials, 5v./ v. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films.
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| Format: | Printed Book |
| Langue: | English |
| Publié: |
San Diego :
Academic Press,
c2002.
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| Description matérielle: | 5 v. : ill. ; 29 cm. |
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| ISBN: | 0125129084 |