APA Edition Citation

Journal of vacuum science & technology A: (quarterly): Vacuum, surfaces and films. American Institute of Physics.

Chicago Edition Citation

Journal of Vacuum Science & Technology A: (quarterly): Vacuum, Surfaces and Films. American Institute of Physics.

MLA Edition Citation

Journal of Vacuum Science & Technology A: (quarterly): Vacuum, Surfaces and Films. American Institute of Physics.

Warning: These citations may not always be 100% accurate.