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00674pam a2200169 a 4500 |
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20200810153953.0 |
| 008 |
820720s1983 nyua 001 0 eng |
| 082 |
0 |
0 |
|a 621.5/5
|b STU
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| 100 |
1 |
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|a Stuart, R. V.
|9 2998
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| 245 |
1 |
0 |
|a Vacuum technology, thin films, and sputtering :
|b an introduction /
|c R.V. Stuart.
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| 300 |
|
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|a viii, 151 p. :
|b ill. ;
|c 24 cm.
|
| 653 |
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|a Vacuum technology.
|a Thin films.
|a Cathode sputtering (Plating process)
|
| 942 |
|
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|c BK
|6 _
|
| 260 |
|
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|a New York :
|b Academic Press,
|c 1983.
|
| 020 |
|
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|a 0126747806
|
| 999 |
|
|
|c 214234
|d 214234
|
| 952 |
|
|
|0 0
|1 0
|2 ddc
|4 0
|6 62155_STU
|7 0
|9 273269
|a PHY
|b PHY
|d 2010-03-22
|l 2
|o 621.5/5 STU
|p PHY007505
|r 2013-11-01
|s 2013-08-20
|w 2010-03-22
|y BK
|