Vacuum technology, thin films, and sputtering : an introduction /

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Bibliographic Details
Main Author: Stuart, R. V.
Format: Printed Book
Language:English
Published: New York : Academic Press, 1983.
Subjects:
Vacuum technology. > Thin films. > Cathode sputtering (Plating process)
Description
Physical Description:viii, 151 p. : ill. ; 24 cm.
ISBN:0126747806

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