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Physics of submicron devices /
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| Format: | Printed Book |
| Language: | English |
| Published: |
New York :
Plenum Press,
c1991.
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| Series: | Microdevices: physics and fabrication technologies
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| Subjects: |
| Physical Description: | xiii, 402 p. : ill. ; 26 cm. |
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| ISBN: | 0306438437 |