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Ion implantation : basics to device fabrication /
| Главный автор: | |
|---|---|
| Формат: | Printed Book |
| Язык: | English |
| Опубликовано: |
Boston :
Kluwer Academic Publishers,
c1995.
|
| Серии: | Kluwer international series in engineering and computer science ;
SECS 293. Kluwer international series in engineering and computer science. Electronic materials, science and technology. |
| Предметы: |
PHY
| Шифр: |
621.3815/2 RIM |
|---|---|
| Копировать | Недоступно состояние Live" What does mean the status Live (working) |