Chargement en cours...
Ion implantation : basics to device fabrication /
| Auteur principal: | |
|---|---|
| Format: | Printed Book |
| Langue: | English |
| Publié: |
Boston :
Kluwer Academic Publishers,
c1995.
|
| Collection: | Kluwer international series in engineering and computer science ;
SECS 293. Kluwer international series in engineering and computer science. Electronic materials, science and technology. |
| Sujets: |
PHY
| Cote: |
621.3815/2 RIM |
|---|---|
| Exemplaire | Statut en temps réel indisponible |