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Ion implantation : basics to device fabrication /
| Autor principal: | |
|---|---|
| Formato: | Printed Book |
| Lenguaje: | English |
| Publicado: |
Boston :
Kluwer Academic Publishers,
c1995.
|
| Colección: | Kluwer international series in engineering and computer science ;
SECS 293. Kluwer international series in engineering and computer science. Electronic materials, science and technology. |
| Materias: |
PHY
| Número de Clasificación: |
621.3815/2 RIM |
|---|---|
| Copia | Estatus de actividad no disponible |