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Semiconductor technology : processing and novel fabrication techniques /

Bibliographic Details
Other Authors: Levinshteĭn, M. E.,ed, Shur, Michael., ed
Format: Printed Book
Language:English
Published: New York : Wiley, c1997.
Subjects:
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245 0 0 |a Semiconductor technology :  |b processing and novel fabrication techniques /  |c edited by Mikhail Levinshtein, Michael S. Shur. 
300 |a xviii, 240 p. :  |b ill. ;  |c 24 cm. 
653 |a Semiconductors  |a Semiconductor doping  |a Semiconductors--Defects 
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700 1 |a Shur, Michael., ed.  |9 5725 
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