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Semiconductor technology : processing and novel fabrication techniques /
| Other Authors: | , |
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| Format: | Printed Book |
| Language: | English |
| Published: |
New York :
Wiley,
c1997.
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| Subjects: |
| Physical Description: | xviii, 240 p. : ill. ; 24 cm. |
|---|---|
| ISBN: | 0471127922 |