Levinshteĭn, M. E., & Shur, M. (1997). Semiconductor technology: Processing and novel fabrication techniques. Wiley.
Chicago Edition CitationLevinshteĭn, M. E.,ed, and Michael Shur. Semiconductor Technology: Processing and Novel Fabrication Techniques. New York: Wiley, 1997.
MLA Edition CitationLevinshteĭn, M. E.,ed, and Michael Shur. Semiconductor Technology: Processing and Novel Fabrication Techniques. Wiley, 1997.
Warning: These citations may not always be 100% accurate.