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971208s1998 enka b 101 0 eng |
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|a 621.3815/2
|b DON
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|a Defect recognition and image processing in semiconductors 1997 :
|b proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997 /
|c edited by J. Donecker and I. Rechneberg.
|
| 300 |
|
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|a xx, 524 p. :
|b ill. ;
|c 24 cm.
|
| 490 |
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|a Institute of physics series;
|v no. 160
|
| 653 |
|
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|a Semiconductors--Defects--Congresses.
|a Image processing--Congresses.
|
| 700 |
1 |
|
|a Donecker, J., ed.
|9 5569
|
| 700 |
1 |
|
|a Rechenberg, I., ed.
|9 5570
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
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|a Bristol ;
|b Institute of Physics Pub.,
|c 1998.
|
| 020 |
|
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|a 0750305002
|
| 111 |
2 |
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|a International Conference on Defect Recognition and Image Processing in Semiconductors
|n (7th :
|d 1997 :
|c Templin, Germany)
|9 5568
|
| 999 |
|
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|c 213322
|d 213322
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| 952 |
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|1 0
|2 ddc
|4 0
|6 62138152_DON
|7 0
|9 271914
|a PHY
|b PHY
|d 2010-03-05
|o 621.3815/2 DON
|p PHY012448
|r 2010-03-05
|w 2010-03-05
|y BK
|