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| LEADER |
00655cam a2200169 a 4500 |
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20200810153116.0 |
| 008 |
950719s1996 nyua b 001 0 eng |
| 082 |
0 |
0 |
|a 621.3815/2
|b CAM
|
| 100 |
1 |
|
|a Campbell, Stephen A.,
|9 5364
|
| 245 |
1 |
4 |
|a The science and engineering of microelectronic fabrication /
|c Stephen A. Campbell.
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| 300 |
|
|
|a xv, 536 p. :
|b ill. ;
|c 25 cm.
|
| 653 |
|
|
|a Semiconductors--Design and construction
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
|
|a New York :
|b Oxford University Press,
|c 1996.
|
| 020 |
|
|
|a 0195105087
|
| 999 |
|
|
|c 213180
|d 213180
|
| 952 |
|
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|0 0
|1 0
|2 ddc
|4 0
|6 62138152_CAM
|7 0
|9 271732
|a PHY
|b PHY
|d 2010-03-03
|o 621.3815/2 CAM
|p PHY011307
|r 2010-03-03
|w 2010-03-03
|y BK
|