Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Chicago Edition CitationCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
MLA引文Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
警告：這些引文格式不一定是100％准確.