APA Alıntı

Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.

Chicago Stili Alıntı

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.

MLA Alıntı

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.