Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Chicago-stil citatCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
MLA-referensCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
Varning: dessa hänvisningar är inte alltid fullständigt riktiga.