APA Citatie

Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.

Chicago Style citaat

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.

MLA citatie

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.