Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
シカゴスタイル引用形Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
MLA引用形式Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
警告: この引用は必ずしも正確ではありません.