Citazione APA

Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.

Stile di citazione Chicago

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.

Citazione MLA

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.