Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Čikaški stil citiranjaCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
MLA način citiranjaCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
Upozorenje: Ovi citati možda nisu uvijek 100% točni.