Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Citación estilo ChicagoCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
Cita MLACampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
Warning: These citations may not always be 100% accurate.