Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Chicago Edition CitationCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
Deismireacht MLACampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
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