Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Style de citation ChicagoCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
Style de citation MLACampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
Attention : ces citations peuvent ne pas être correctes à 100%.