APA aipamena

Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.

Chicago Style aipamena

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.

MLA aipamena

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.