Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Παραπομπή Chicago StyleCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
Παραπομπή MLACampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
Πρόσοχή: Οι παραπομπές μπορεί να μην είναι 100% ακριβείς.