Cita APA

Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.

Chicago Edition Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.

Cita MLA

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.