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Laser microfabrication : thin film processes and lithography /

書目詳細資料
其他作者:	Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
格式:	Printed Book
語言:	English
出版:	Boston : Academic Press, c1989.
主題:	Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.

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