Laser microfabrication : thin film processes and lithography /

Detalhes bibliográficos
Outros Autores: Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
Formato: Printed Book
Idioma:English
Publicado em: Boston : Academic Press, c1989.
Assuntos:
Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.

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