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Laser microfabrication : thin film processes and lithography /

Bibliographic Details
Other Authors:	Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
Format:	Printed Book
Language:	English
Published:	Boston : Academic Press, c1989.
Subjects:	Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.

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