Laser microfabrication : thin film processes and lithography /

Sonraí Bibleagrafaíochta
Údair Eile: Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
Formáid: Printed Book
Teanga:English
Foilsithe: Boston : Academic Press, c1989.
Ábhair:
Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.

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